Robot Arm Span:320mm

Maximum Load Capacity:Up to 5kg

Operating Speed:Variable, up to 1200mm/s

Precision Positioning:±0.05mm

Power Supply:230V AC, 50/60Hz

Control System:EtherCAT

Communication Protocol:Modbus TCP/IP

Robot Weight:Approximately 120kg

Environmental Conditions:Temperature: 0°C to 40°C, Humidity: 10% to 80% RH

    The Dynax 65AX-089 wafer transfer robot is engineered to streamline the production process in semiconductor fabrication facilities. With its advanced motor control system, it offers precise speed adjustment for optimal handling of wafers and other materials.

    Featuring a stainless steel frame, the robot ensures durability and resistance to corrosive environments typically found in cleanrooms. Its design adheres to strict Class 100 cleanroom standards, ensuring minimal particulate generation and contamination risk.

    Capable of handling payloads up to 30kg, the Dynax 65AX-089 is versatile enough for a wide range of applications within the semiconductor industry. Its variable speed motor allows for gentle yet efficient movement of heavy loads, reducing the risk of damage to sensitive components.

    Safety is paramount in any industrial setting, and the Dynax 65AX-089 comes equipped with essential safety features. An emergency stop button ensures immediate shutdown in case of emergencies, while overload protection safeguards against potential accidents caused by excessive force.

    Incorporating cutting-edge technology and rigorous quality control, the Dynax 65AX-089 wafer transfer robot is an indispensable tool for enhancing productivity and maintaining high standards of cleanliness and precision in semiconductor manufacturing.