Digital guide
- Home
- Other brands
- Brooks Automation 001-4130-03
Brooks Automation 001-4130-03
Brooks Automation 001-4130-03
1、 Technical specifications
Alignment accuracy: ± 2 μ m in the X/Y direction and ± 0.1 mrad in the θ direction.
Repeatability: X/Y direction is 0.5 μ m, θ direction is 0.05mrad.
Scanning range: ± 20mm in the X/Y direction and ± 5 ° in the θ direction.
Speed: 100mm/s in the X/Y direction and 10 °/s in the θ direction.
Detailed content
2、 Functional characteristics
High precision wafer alignment: This module uses high-precision sensors and servo drivers to control the movement of the wafer in the X, Y, and θ directions, ensuring perfect alignment between the wafer and the target position.
Good compatibility: This module is compatible with various wafer sizes and materials, and is suitable for various wafer processing processes.
High performance control: designed to provide precise motion or process control, suitable for demanding automation applications such as semiconductor manufacturing equipment, precision positioning systems, or material handling in advanced manufacturing.
Integration: With good system integration capabilities, it can easily communicate with other Brooks Automation devices and third-party devices, achieving unified management of complex automation processes.
Intelligent functions: including intelligent diagnosis, adaptive control, or remote monitoring, making it easy to maintain and optimize system performance.
Stability and Durability: Designed for industrial environments, it may have characteristics such as dustproof, vibration resistance, and a wide temperature range to ensure long-term stable operation under harsh conditions.
3、 Application scenarios
The Brooks Automation 001-4130-03 module is widely used in wafer fabrication processes, including photolithography, etching, deposition, diffusion, ion implantation, and more.
The above information is based on currently available data and aims to provide you with comprehensive and accurate information about the Brooks Automation 001-4130-03 module. If you need further information or have any questions, it is recommended to contact Brooks Automation’s official channels or relevant experts directly